Offers for industrial users

The AZM team assists the activities of our industrial partners in every single phase of a micro structure process setup. We have special experience in the X-ray lithography including X-ray mask technology. Due to the excellent characteristics of synchrotron light it is the ideal source for X-ray lithography. Even ultra thick (> 500 µm) resist layers can be patterned successfully with high resolution in the sub-micrometer range.Thus, X-ray lithography is best qualified for the production of microstructures with high aspect ratio micro structures (HARMS). more

Three independent beamlines with State-of-the-art technologies enable efficient data acquisition with excellent quality. The infrastructure adjacent to the experimental end stations offers excellent facilities for users of the beamlines and includes office space, a sample preparation lab and computing resources. And of course, the competent BESSY-MX crew including their newest member - a robot - will assist you before and during your beamtime. Besides the standard procedure we offer Mail-in Crystallography as a full service option. more