Analytical Methods
A variety of measurement methods are available for structural, optical, and electrical characterizations. These methods serve device analysis as well as basic materials research.
Structural (morphological) characterization methods
Atomic/chemical structure characterization methods
- Fourier transform infrared spectroscopy (FTIR)
- Raman spectroscopy
- Effusions mass spectroscopy
- Energy dispersive X-ray analysis (EDX)
- Auger electron spectroscopy (AES)
Optical characterization methods
- Optical spectroscopy (UV, VIS, NIR)
- Ellipsometry
- Constant photocurrent method (CPM)
- Photothermal deflection spectroscopy (PDS)
Electrical characterization methods
Defect analysis methods