Silicon photovoltaics
Technological Processes
The preparation of thin-film and heterostructure solar cells requires deposition techniques for absorber-, emitter-, and contact layers as well as surface structuring techniques. For the preparation of crystalline silicon thin-films on glass, crystallization techniques for amorphous silicon on glass are investigated.
Deposition Techniques
Plasma deposition (CVD Laboratory)
- ECR-CVD (electron cyclotron resonance chemical vapor deposition)
- PE-CVD (plasma enhanced chemical vapor deposition)
Deposition under ultra high vacuum (UHV Laboratory)
Evaporation and sputter technique (PVD Laboratory)
- thermal evaporation / electron beam evaporation
- magnetron sputter technique
Crystallization of amorphous silicon thin films
Solar cell technology
- Semiconductor technological processes
- Low temperature passivation
- Wet chemical conditioning of surfaces
Transparent Conducting Oxides (TCO)
