Thin layer laboratories
Dr. K. Ellmer
- Sputtering plants (reactive magnetron sputtering)
- High vacuum coating plant
- Seebeck measuring station
- Optical plasma emission monitor
- Energy-resolved mass spectrometer
- Residual gas mass spectrometer
- 4-point probe measurement set-up
- Chemical vapor phase deposition system
- Hall-effect equipment for conductivity measurements
Material preparation Laboratories
Dr. S. Fiechter
- Catalyst- and layer-synthesis under gas-flow in split-hinge furnaces equipped with quartz tube liners
- Temperature controlled furnaces (up to 1300°C)
- Multi-zone furnaces (up to 1300°C)
- Pumping station to prepare closed silica tubes filled with different gas atmospheres
- X-Ray powder Diffractometer (XRD)
- Differential-thermal gravimetric analysis systems (Differential Scanning Calorimeter (DSC); Thermal Gravimetry coupled with Mass Spectrometry (TG-MS); Differential Thermal Analyzer (DTA))
- Microwave reactor
- Autoclave (500°C, 100 bar)
Interface engineering
Prof. Dr. H. J. Lewerenz
(Photo)-Electrochemical Laboratories
Dr. P. Bogdanoff
Material Characterization
Dr. P. Bogdanoff
(Opto)electronic characterization
Dr. M. Kunst