Funded by the German Research Foundation (DFG)
Project No, LE 1192/4-1/2
Surface structuring and patterning of silicon substrates can be achieved by a great variety of modern techniques. Photolithographic masking employing extreme ultraviolet or X-ray radiation, the application of electron beams, ion beams, or direct laser writing are some advanced examples in a field likewise important to research and industry. These techniques allow selective and regular manipulation of surface areas and the resolution limit reaches, with increasing costs of operation and implementation, values below 10 nm.
Purpose of the project introduced here and funded by the DFG, is to determine experimental conditions for self-organized electrochemical fabrication of silicon and silicon dioxide structures on the nanoscale such as single pores, pore networks, nanocrystals and nanostructure arrays. Initial surface modifications after electrochemical preparation are analyzed by a combinatorial approach of surface-sensitive measurement techniques. Model experiments by, for instance, AFM-nanoindentation are furthermore employed in order to analyze the interplay of chemical, electrochemical and elastic properties at local sites. Empirical efforts are accompanied by model considerations whose predictions are tested against experimental findings. It is thereby attempted to predict structure formation and propagation and to optimize the desired forms, densities and sizes. For this purpose, also self-organized fractal microstructures are prepared and analyzed as large-scale counterparts of the nanoscopic topographies. These larger patterns can be easier investigated by spatially resolved measurement techniques and provide valuable information about interdependencies that also influence the electrochemical processes at the nano-scale.
Examples of electrochemically prepared surface topographies are shown on the pages in the research section. The morphological and chemical analyses, presented there, were achieved by synchrotron radiation photoelectron spectroscopy (SRPES), atomic force microscopy (AFM), scanning electron microscopy (SEM) and in-situ real time Brewster-angle reflectometry (BAR). Results of model considerations are illustrated by two movies simulating the self-organized propagation of fractal structures on Si(100) surfaces. Other models developed so far refer to nanostructure formation principles in diluted NH4F and the mathematical relation between in situ reflectance data and charge flow during dissolution of the silicon electrode.
Please follow the links on the publications section for further details.
Current research topics