Technology Centre for ultraprecise Reflection Gratings
Installation of a technological center for highly efficient optical gratings at HZB
The Institute of Nanometre Optics and Technology (INT) of HZB establishes a technology centre for production and characterisation of highly efficient precision gratings. This centre was made possible by financial support from the European Union (EFRE contract 20072013 2/43).
This project combines the long time expertise, the large infrastructure and the leading position of our institute in the field of design, development, production, characterisation and application of high quality optics to be used for optical systems and synchrotron radiation beamlines from IR to hard x-rays
In this centre diffraction gratings for synchrotron radiation will be developed and produced by various methods. Highest grating efficiency is obtained by blazed gratings which have a saw-tooth profile. The required precision of the saw-tooth profile in the nanometer range at blaze angles down to 0.1 degree is technologically challenging.
During the first project year, the R&D activities of the grating projects were focused on achieving four goals:
● the conceptual design and development of a new ruling machine
● the fabrication of Si blazed gratings by the chemical etching of asymmetrically cut Si crystals
● the development and construction of a new reflectometer for at-wavelength characterisation of the gratings
● the development and construction of a new ion etching machine.
The conceptual design of the new ruling machine was finished in summer 2011. The new machine is currently under construction. It is planned to be ready for transport and testing in Berlin-Adlershof in the summer of 2013.
The fabrication of blazed gratings on asymmetrically cut Si-crystals is under development. Tests for the best protecting layers and etching processes for the window definition were performed. The primary window definition is to be carried out by e-beam writing. Activities are now focused on adjusting the crystal plains during the wet etching process.
HZB has recently taken over the old gratings fabrication line from Carl Zeiss, Oberkochen including the old ruling machine, the ion etcher, the laser interference equipment, and the measurement and PVD equipment. It will be installed and used to improve upon the established processes. In the case of successful installation, first gratings can be fabricated.
for further information click here: Poster Grating Project
