Publications

Loechel, B.; Goettert, J.; Gruetzner, G.; Bednarzik, M.; Waberski, C.; Ahrens, G.; Engelke, R.; Singh, V.; Degen, R.; Kirsch, U.
"Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears"
Microsyst Technol, DOI 10.1007/s00542-008-0607-2

Bednarzik, M.; Waberski, C.; Rudolph, I.; Loechel, B.; Herbstritt, F.; Ahrens, G.
"Mixer slit plates fabricated by direct-LIGA"
Microsyst Technol, DOI 10.1007/s00542-008-0569-4

Engelke, R.; Mathuni, J.; Ahrens, G.; Gruetzner, G.: Bednarzik, M.; Schondelmaier, D.; Loechel, B.
"Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique"
Microsyst Technol, DOI 10.1007/s00542-007-0537-4

Loechel, B., Bednarzik, M., Waberski, C.
"Anwendung des Direkt-LIGA-Verfahrens zur Herstellung von Mikrostrukturen mit hohem Aspektverhältnis"
Galvanotechnik, Vol. 11, 2007, S. 2816 – 2822.

Barth, M., Kouba, J., Stingl, J., Löchel, B.,Benson, O.
„Modification of visible spontaneousemission with silicon nitride photoniccrystal nanocavities“
Opt. Express, Vol. 15(25), 2007, pp. 17231-17240.

Kouba, J., Englelke; R., Bednarzik, M., Ahrens, G., Scheunemann, H.-U., Gruetzner, G., Loechel, B., Miller, H., Haase, D.
"SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts“
Microsystems Technology, Vol. 13, 2007, pp. 311-317.

Eichelbaum, M., Rademann, K., Weigel, W., Loechel, B., Radtke, M., Mueller, R.
„Gold-Ruby Glass in a New Light, on the Microstructuring of Optical Glasses with Synchrotron Radiation“
Gold Bulletin, Vol. 40/4, 2007, pp. 1 – 5.

Krylov, A.V., Adamzig, H., Walter, A.D., Loechel, B., Kurth, E., Pulz, O., Szeponik, J., Wegerich, F., Lisdat, F.
„Parallel generation and detection of superoxide and hydrogen peroxide in a fluidic chip“
Sensors and Actuators B, Vol. 119, 2006, pp. 118 – 126.

Kouba, J., Kubenz, M., Mai, A., Ropers, G., Eberhardt, W., Loechel, B.
“Fabrication of Nanoimprint stamps for photonic crystals”
Journal of Physics: Conference Series, Vol. 34, 2006, pp. 897-903.

Kouba, J., Bednarzik, M., Engelke, R., Ahrens, G., Miller, H., Haase, D.
“Optimizing SU-8 resist to fabricate micro-metallic structures”
Solid State Technology, Vol. 49(4), 2006, pp. 39-44.

Loechel, B.
„In der ersten LIGA der Mikrotechnik“
Mikroproduktion, Vol. 4, 2006, S. 10-13.

Hormes, J., Goettert, J., Lian, K., Desta, Y., Jian, L.K.
"Materials for LiGA and LiGA-based Microsystems"
Nuclear Instruments and Methods in Physics Research B, Vol. 199, 2003.

Loechel, B.
"Thick Layer Resists for Surface Micromachining"
Journal of Micromechanics and Microengineering, Vol. 10, 2000, pp. 108-115.

Johansen, L.S., Ginnerup, M., Tang, P.T., Ravnkilde, J.T., Loechel, B.
"Fabrication of Electroplated 3D Microstructures Combining KOH Etching, Electrodeposition of Photoresist and Selective Etching"
Sensors & Actuators A: Physical, Vol. 83, 2000, pp. 156-160.

Loechel, B.; Schondelmaier, D.; Loergen, M.; Waberski, C.; Rudolph, I.; Beuerle, J.; Dawan, F.; Goettert, J.; Jin, Y.; Singh, V.
"The X-ray Mask - a Cornerstone in Commercializing LIGA"
13th International Commercialization of Micro and Nano Systems Conference (COMS 2008), Puerto Vallarta, Mexico, August 31 - September 4, 2008.

Mertsch, O.; Schondelmaier, D.; Loergen, M.; Walter, A.; Rudolph, I.; Kutz, O.; Loechel, B.
"Nano-structured ultra-hydrophobic surfaces for fresh fruit packaging"
13th International Commercialization of Micro and Nano Systems Conference (COMS 2008), Puerto Vallarta, Mexico, August 31 - September 4, 2008.

Schleunitz, A.; Piechotka, E.; Reuther, F.; Schondelmaier, D.; Loechel, B.
"Initiating a Supplier Alliance for Nanoimprint Lithography (NIL) and Nanoembossing"
13th International Commercialization of Micro and Nano Systems Conference (COMS 2008), Puerto Vallarta, Mexico, August 31 - September 4, 2008

Mertsch, O., Schondelmaier, D., Walter, A.D., Rudolph, I., Loechel, B.
„Ultrahydrophobe Oberflächen für auf Tropfenanalytik basierende Biochipsysteme“
8. Dresdner Sensor Symposium, Dresden, Germany, December 10-12, 2007, pp. 303-306.

Walter, A.D., Mertsch, O., Schleunitz, A., Kouba, J., Eberhardt, W., Schondelmaier, D., Loechel, B.
„Neue Wege zur optischen Analyse entfalteter DNA-Moleküle“
8. Dresdner Sensor Symposium, Dresden, Germany, December 10-12, 2007, pp. 119-122.

Kouba, J., Eberhardt, W., Loechel, B.
„Herstellung und optische Charakterisierung siliziumnitrid-basierender photonischer Kristalle für Anwendungen im sichtbaren Bereich“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 1041-1044.

Engelke, R., Mathuni, J., Ahrens, G., Gruetzner, G., Bednarzik, M., Schondelmaier, D., Loechel, B., Gutsche, M., Cuccinelli, M.
„Untersuchung eines neuen hochproduktiven Plasmaverfahrens zum Entfernen von SU 8 nach der Abformung metallischer LIGA-Mikroteile“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 139-142.

Loechel, B., Bednarzik, M., Waberski, C., Rudolph, I., Kutz, O., Mucha, S., Schondelmaier, D., Scheunemann, H.-U.
„Anwendung des Direkt-LIGA-Verfahrens zur Herstellung von Mikrostrukturen mit hohem Aspektverhältnis“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 643-646.

Kirsch, U., Gruetzner, G., Loechel, B., Degen, R., Bednarzik, M., Waberski, C., Ahrens, G., Engelke, R.,
„Direkt-LIGA-NiFe-Zahnräder mit extremen Aspektverhältnissen für Micro Harmonic Drive® Getriebe“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 1069-1072.

Schleunitz, A., Kouba, J., Rudolph, I., Schondelmaier, D., Loechel, B.
„Galvanische Abformung von mikro- und nanostrukturiertem Silizium für die Herstellung metallischer Formwerkzeuge“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 561-564.

Voigt, A., Götz, F., Rudolph, I., Heinrich, M., Lilienhof, H.-J., Waberski, C., Stockhofe, C., Scheunemann, H.-U., Hollmann, H., Gruetzner, G., Loechel, B.
„Herstellung hochpräziser planarer Mikropumpen mit Hilfe des Direkt-LIGA-Verfahrens“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 545-548.

Mertsch, O., Schondelmaier, D., Walter, A.D., Rudolph, I., Loechel, B.
„Electro Wetting - Transport von Mikrotropfen auf lithographisch hergestellten, ultra-hydrophoben Oberflächen“
Mikrosystemtechnik Kongress 2007, Dresden, Germany, October 15-17, 2007, pp. 619-622.

Mertsch, O., Walter, A.D., Rudolph, I., Schondelmaier, D., Loechel, B.
„Ultra hydrophobic and nano porous plant like surfaces fabricated by UV reverse side exposure“
11th International Conference on Miniaturized Systems for Chemistry and Life Sciences -µTAS 2007, Paris, France, October 7-11, 2007.

Schleunitz, A., Kouba, J., Schondelmaier, D., Loechel, B.
„Functional Polymer Structures at the Micro- and Nanometer Level Fabricated with Silicon Stamps and Nanoimprint Technique“
33rd International Conference on Micro- and Nano- Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007, pp. 657-658.

Schleunitz, A., Firsov, A., Rudolph, I., Svintsov, A., Zaitsev, S., Loechel, B.
„Fabrication of Nanoimprint Stamps for Rainbow Holograms using SEM based E-Beam Lithography“
33rd International Conference on Micro- and Nano- Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007, pp. 553-554.

Kouba, J., Kiss, S., Kubalski, M., Loechel, B.
„Broad band transmission characteristics of silicon nitride photonic cyrstals for visible wavelengths“
33rd International Conference on Micro- and Nano- Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007, pp. 147-148.

Mertsch, O., Schleunitz, A., Walter, A.D., Rudolph, I., Schondelmaier, D., Loechel, B.
„Diffraction supported creation of artificial ultra-hydrophobic micro and nano structures“
33rd International Conference on Micro- and Nano- Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007, pp. 403-404.

Walter, A.D., Mertsch, O., Koehler, C., Adamzig, H., Hausdorf, L., Klocke, M., Froehling, A., Klocke, S., Schlueter, O., Schondelmaier, D., Loechel, B.
„Contamination Control of Agricultural Products by On-Chip PCR and Flow Cytometry“
12th International Commercialization of Micro and Nano Systems Conference (COMS 2007), Melbourne, Australia, September 2-6, 2007.

Walter, A.D., Mertsch, O., Schleunitz, A., Kouba, J., Eberhardt, W., Schondelmaier, D., Loechel, B.
„New Approach for DNA Analysis in a Single Molecule System“
12th International Commercialization of Micro and Nano Systems Conference (COMS 2007), Melbourne, Australia, September 2-6, 2007.

Schondelmaier, D., Kouba, J., Walter, A.D., Schleunitz, A., Rudolph, I., Loechel, B.,
„Molding Tools for Micro- and Nanoscale Applications“
12th International Commercialization of Micro and Nano Systems Conference (COMS 2007), Melbourne, Australia, September 2-6, 2007.

Barth, M., Kouba, J., Stingl, J., Loechel, B., Benson, O.
„SiN photonic crystal cavities: promising tools for the manipulation of light in the visible“
SPIE Optics & Photonics 2007, San Diego, USA, August 26-30, 2007.

Kouba, J., Kiss, S., Barth, M., Eberhardt, W., Loechel, B.
„Fabrication and optical characterization of Si3N4 2D-photonic crystals for applications in visible range“
SPIE Optics & Photonics 2007, San Diego, USA, August 26-30, 2007.

Kouba, J., Scheunemann, H.-U., Waberski, C., Rudolph, I.
„Advances in Fabrication of X-ray Masks based on Vitreous Carbon“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 269-270.

Vora, K.D., Skew, B.-J., Loechel, B., Harvey, E. C., Hayes, J.P., Peele, A.G.
„Sidewall Slopes and Roughness of SU-8 HARMST“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 65-66.

Hammacher, J., Fuelle, A., Flaemming, J., Saupe, J., Loechel, B., Grimm, J.
„Stress Engineering and Mechanical Properties of SU-8-Layers for Mechanical Applications“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 139-140.

Bednarzik, M., Herbstritt, F., Loechel, B., Ahrens, G.
„Mixer Slit-Plates Fabricated by Direct - LIGA“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 59-60.

Schirmer, M., Perseke, D., Schondelmaier , D., Rudolph, I., Loechel, B.
„Fabrication of X-ray Masks in a Two-step Process Using CAR 44 Photo Resist“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 283-284.

Hahn, L., Scheunemann, H.-U., Pasch, H.
„INNOLIGA (Innovative Negative Resist Development for Industrial Applications of X-Ray LIGA)– A New German Research Funding Project“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 257-258.

Goettert, J., Overton, E., Loechel, B., Yemane, D., Bhushan, A., Singh, V.
“Process Optimization for Fabricating High Aspect Ratio Gas Chromathography (µGC) Columns”
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 85-86.

Singh, V., Gunda, V., Yemane, D., Goettert, J., Zittermann, B., Rudolph, I., Bednarzik, M., Loechel, B.
„Stress Free, Uniform Composition and High Aspect Ratio Electrodeposited Ni-Fe MEMS Structures“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 251-252.

Loechel, B., Gruetzner, G., Degen, R., Kirsch, U., Bednarzik, M., Waberski, C., Ahrens, G., Engelke, R., Goettert, J., Singh, V.
“Extreme Aspect Ratio NiFe Gear Wheels for the Production of Commercially Available Micro Harmonic Drive Gears”
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 105-106.

Friese, H., Knipper, S., Singh, V., Goettert, J., Rudoph, I., Loechel, B.
„Advanced Electroplating Capabilities for Commercial High Aspect Ratio MEMS and NEMS Applications“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 227-228.

Engelke, R., Mathuni, J., Ahrens, G., Gruetzner, G., Bednarzik, M., Loechel, B.
„Investigations of SU-8 removal from metallic high aspect ratio micro structures with a novel plasma technique“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 39-40.

Mertsch, O., Walter, A.D., Rudolph, I., Schondelmaier, D., Loechel, B.
„Fabrication of ultra-hydrophobic and nano-porous high aspect ratio micro structures for the application in Bio-Chips and MEMS“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 113-114.

Voigt, A., Heinrich, M., Gruetzner, G., Kouba, J., Scheunemann, H.-U., Rudolph, I.
„A new UV sensitive positive resist for X-ray masks manufacture“
7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), Besancon, France, June 7-9, 2007, pp. 293-294.

Mertsch, O., Walter, A.D., Schondelmaier, D., Loechel, B.
„Lithographically fabricated ultra-hydrophobic and porous plant-like surfaces for bio chip applications“
The Nanotechnology Conference and Trade Show (NSTI Nanotech), Santa Clara, USA, May 20-24, 2007, p. 332.

Kouba, J., Schondelmaier, D., Rudolph, I., Walter, A., Schleunitz, A., Ropers, G., Mai, A., Loechel, B.
„Formwerkzeuge für Anwendungen von Mikro bis Nano“
GMM-Workshop Technologien und Werkstoffe der Mikro- und Nanosystemtechnik, Karlsruhe, Germany, May 7-8, 2007, pp. 111-115.

Schleunitz, A., Kouba, J., Schondelmaier, D., Loechel, B.
„Herstellung von polymeren Permanentstrukturen durch Nanoimprint“
GMM-Workshop Technologien und Werkstoffe der Mikro- und Nanosystemtechnik, Karlsruhe, Germany, May 7-8, 2007, pp. 207-212.

Schondelmaier, D., Loechel, B., Krueger, S., Altwasser, S.
“Microfabrication of Diffractive Optical Elements”
11th International Commercialization of Micro and Nano Systems Conference (COMS 2006), St. Petersburg, USA, August 27-31, 2006.

Kouba, J., Eberhardt, W., Loechel, B.
“Wavelength filter for visible wavelengths based on photonic crystal”
SPIE Photonics Europe 2006, Strasbourg, France, April 3-7, 2006.

Kouba, J., Schondelmaier, D., Schade, U., Rudoplh, I., Bednarzik, M., Eberhardt, W., Loechel, B.
„Metallic Photonic Crystal for THz Radiation”
SPIE Photonics Europe 2006, Strasbourg, France, April 3-7, 2006.

Walter, A.D., Krylov, A.V., Lisdat, F., Loechel, B.,
„Auf dem Weg zu einem Lab-on-a-chip-System – Nachweis von Antioxodantien“
13th Heiligenstädter Kolloquium „Technische Systeme für Biotechnologie und Umwelt“, Heiligenstadt, Germany, 2006, pp. 205-211.

Walter, A.D., Mertsch, O., Beisser, N., Krylov, A., Lisdat, F., Adamzig, H., Loechel, B.
„Mikrofluidik und Sensortechnik - Innovationstool in der -Diagnostik Anti-Aging“
7. Dresdner Sensor-Symposium, Dresden, Germany, December 12-14, 2005, pp. 215-218.

Mertsch, O., Walter, A.D., Loechel, B.
„Die LIGA-Technik – große Potentiale für Biosensorchip-Applikationen“
7. Dresdner Sensor-Symposium, Dresden, Germany, December 12-14, 2005, pp. 229-232.

Engelke, R., Ahrens, G., Ruhmann, R., Kopetz, S., Bednarzik, M., Loechel, B., Neyer, A., Gruetzner, G.
„A Comparative Study on the Sidewall Profile of PMMA and SU 8 Moulds Made by DXRL and of Electroformed Metallic Counterparts“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Engelke, R., Ahrens, G., Ruhmann, R., Kopetz, S., Kastner, J., Wiesauer, K., Stifter, D., Loechel, B., Neyer, A., Gruetzner, G.
„Possibilities of Inline Process Inspection of High Aspect Ratio LIGA Micro Structures“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Bednarzik, M., Jian, L., Kouba, J., Herzog, J., Loechel, B., Scheunemann, H.-U., Firsov, A.
„Optimization of the fabrication process of ultra thick, high aspect ration SU-8 structures using X-ray Lithography“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Beisser, N., Schondelmaier, D., Rudolph, I., Kouba, J., Loechel, B.
„Determination of the mechanical properties of electroplated metals“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Jian, L., Desta, Y., Goettert, J., Lian, K., Bednarzik, M., Scheunemann, H.-U., Loechel, B., Moser, H.O.,, Wilhelm, O.
„HARMST by means of SU-8 Based Optical Lithography and Deep X-ray Lithography“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Loechel, B., Goetter, J., Desta, Y.,
„Direct - LIGA service for prototyping - a status report“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Scheunemann, H.-U., Jian, L., Loechel, B., Hahn, L., Meyer, P., Schulz, J.
„Improvement of low cost X-ray mask technology – A comparison of beryllium and carbon based masks“
6th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2005), Gyeongju, Korea, June 10-13, 2005.

Kouba, J., Ling, Z.-G., Wang, L., Desta, Y.M., Goettert, J.
“Fabrication of large-area x-rays masks for UDXRL on beryllium using thin film UV lithography and x-ray backside exposure”
SPIE Micromachining and Microfabrication Process Technology IX, San Jose, USA, 2004.

Desta, Y., Goettert, J., Ling, Z., Yoonyoung, J., Singh, V., Loechel, B., Bednarzik, M., Linke, J., Gruetzner, G., Ruhmann, R., Ahrens, G.
“Direct-LIGA Fabrication for MEMS Applications“
ASME 2004, Annaheim, USA, 2004.

Jian, L. K., Loechel, B., Scheunemann, H.-U., Bednarzik, M., Firsov, A.
"Vitreous Carbon Membrane X-ray Masks for LIGA Process"
8th International Conference on the Commercialization of Micro and Nano Systems (COMS 2003), Amsterdam, Netherlands, September 8-11, 2003.

Jian, L. K., Loechel, B., Scheunemann, H.-U., Bednarzik, M., Desta, Y., Goettert, J.
"Fabrication of Ultra thick and Ultra High Aspect Ratio Microstructures by Deep and Ultra Deep X-ray Lithography"
International Conference on MEMS, NANO, and Smart Systems, Banff, Albert, Canada, July 20-23, 2003.

Jian, L.K., Bednarzik, M., Loechel, B., et al
"Improvement in Cost-Effective X-ray Mask Fabrication"
5th International Workshop on High-Aspect-Ratio Micro-Structures Technology (HARMST 2003), Monterey, USA, June 15-17, 2003

Gruetzner, G., Ruhmann, R., Ahrens, G., Loechel, B., Bednarzik, M.
"Improving the Process Capabilities of SU-8 in Deep X-Ray Lithography"
5th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2003), Monterey, USA, June 15-17, 2003.

Desta, Y. M., Loechel, B., Goettert, J.
"X-ray Masks for LIGA Process"
5th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2003), Monterey, USA, June 15-17, 2003.

Scheunemann, H.-U., Loechel, B., Jian, L.K., Schondelmaier, D.
"Cost Effective Masks for Deep X-ray Lithography"
SPIE Microtechnologies for the New Millennium 2003, Canary Islands, Spain, May 19 -21, 2003.

Bednarzik, M., Scheunemann, H.-U., Barth, A., Schondelmaier, D., Loechel, B.
"First Results in Patterning of Ultra High Ratio Microstructures by a 4 T Wave Length Shifter at BESSY"
Proc. SPIE 2003, Banff, Canada, 2003.

Desta, Y., Jian, L.K., et al
"Borosilicate Glass Based X-ray Masks for LIGA Microfabrcation"
SPIE 2003 International Symposium on Micromachining and Microfabrication, San Jose, USA, 2003.

Jian, L.K., Desta, Y., Goettert, J., Bednarzik, M., Loechel, B., et al
"SU-8 Based Deep X-ray Lithography /LIGA"
SPIE 2003 International Symposium on Micromachining and Microfabrication, San Jose, USA, 2003.

Jian, L., Desta, Y. M., Aigeldinger, G., Bednarzik, M., Loechel, B., Goettert, J.
"SU-8 Based Deep X-ray Lithography/Liga "
Proc. SPIE 2002, Boston, Massachusetts, 2003.

Meyer, P., Hahn, L., Bade, K., Hein, H., Schulz, J., Loechel, B., Scheunemann, H.-U., Schondelmaier, D., Singleton, L.
"MODULIGA: The LIGA Process as a Modular Production Method – Current Standardisation State of the LIGA Process in Germany "
Proc. SPIE 2002, Boston, Massachusetts, 2003.

Scheunemann, H.-U., Loechel, B., Jian, L., Schondelmaier, D., Goettert, J., Desta, Y. M., Ling, Z.-G., Morris, T., Joonyoung, J., Singh, V., Degen, R., Kirsch, U., Gruetzner, G., Ruhmann, R., Ahrens, G.
"Providing a Direct-LIGA Service – A Status Report"
7th International Commercialization of Micro and Nano Systems Conference (COMS 2002), Ypsilanti, USA, September 8-12, 2002.

Jian, L.K., Desta, Y., Goettert, J., Loechel, B., et al
"SU-8 Based Lithography Processes for Fabricating Complex Multi-level 3D Structures"
Pacific Rim Workshop on Transducers and Micro/Nano Technologies, Xiamen, China, July 22-24, 2002.

Jian, L., Desta, Y. M., Goettert, J., Loechel, B.,
"SU-8 Based Lithography Processes for Fabricating Complex Multi-level 3D Structures"
Pacific Rim Workshop on Transducer and Micro/Nano Technologies, Xiamen, China, July 22-24, 2002.

Kouba, J.
„Applications of silicon nitride photonic crystals in visible wavelength range”
Center for Advanced Microstructures and Devices (CAMD), Louisiana State University, Baton Rouge, USA, September 3, 2007.

Schondelmaier, D., Walter, A.D.
„LIGA and Micro Patternd Components“
Monash University, Melbourne, Australia, September 11, 2007.

Schondelmaier, D.
„Werkzeugherstellung mit LIGA“
IKV Seminar "Mikrotechnologie - Bauteile und Strukturen präzise abformen", Aachen Germany, June 23, 2006.

Kouba, J.
“Preparation of micro moulding tools by LIGA Technique”
ZEMI Summer School - Adaptive Optics and Microoptics, Berlin, Germany, August 7-11, 2006.

Schleunitz, A.
„Nanoimprint mit Si-Werkzeugen – Ein Überblick“
Seminar Sensorik und Mikrotechnologien, Technische Universität Berlin, Berlin, Germany, November 28, 2006.

Schleunitz, A., Loechel, B.
“Direkt-LIGA für HARMST-Produkte”
Tagung Oberflächentechnologien und Mikrosysteme, Westsächsische Hochschule Zwickau, Zwickau, Germany, June 5-6, 2006.

United States Patent: Jun. 6. 2006
US 7,055,758 B2
"Marking Device, Method and Apparatus for the production thereof and a method for reading a marking device of this type"
J. Morenzin, D. Schondelmaier, W. Eberhardt

Kouba, Josef
Investigation of silicon nitride based two-dimensional photonic crystals for the visible spectral range
Technische Universität Berlin, April 2008

Kiss, Sebastian
„Untersuchung und Herstellung von Defekten in zweidimensionalen Photonischen Kristallen aus Si3N4"
Fachhochschule für Technik und Wirtschaft (FHTW) Berlin, August 2007

Weniger, Christian
„Konstruktion einer Mikrofluidikzelle für Wasseruntersuchungen mit der Röntgen-Absorptions-Spektroskopie (XAS)“
Technische Fachhochschule (TFH) Berlin, Juni 2007

Kubalski, Markus
„Spektroskopische Untersuchungen an photonischen Kristallen“
Technische Fachhochschule (TFH) Berlin, Februar 2007

Petermann, Florian
„Charakterisierung mechanischer Eigenschaften galvanisch abgeschiedener, mikrotechnischer Materialien“
Fachhochschule (FH) Münster, Dezember 2006

Stockhofe, Christian
„Aufbau und Analyse eines Direkt-LIGA Fertigungsprozesses von mikrotechnischen Bauteilen mit sehr hohen Aspektverhältnissen„
Fachhochschule (FH) Gelsenkirchen, Juli 2006

Kutz, Oliver
„Herstellung von Siliziumoxidschichten mittels PECVD und deren Charakterisierung“
Abschlussarbeit zur Ausbildung zum Mikrotechnologen, Juli 2006

Waberski, Christoph
„Entwicklung geeigneter Prozesse für die Herstellung von Röntgenmasken basierend auf Glaskohlenstoffmembranen“
Technische Fachhochschule (TFH) Berlin, Juni 2006

Mai, Alexander
„Charakterisierung des Verfahrens Heißprägen zur Abformung von Mikrostrukturen in thermoplastischen Kunststoffen“
Technische Fachhochschule (TFH) Berlin, Oktober 2005

Kutz, Oliver
„Bestimmung der Sputterraten von Titan“
Zwischenprüfung zur Ausbildungsberuf zum Mikrotechnologen, April 2005

Hoffmann, Marc
„Ermittlung materialspezifischer Eigenschaften von galvanisch abgeschiedenen Schichten“
Technische Fachhochschule (TFH) Berlin, 2005

Neitzke, Bernhardt
„Entwicklung und Charakterisierung eines Verfahrens zur Direktkopie von Röntgenmasken“
Technische Fachhochschule (TFH) Berlin, April 2004

Rudolph, Ivo
„Untersuchungen von Galvanikstartschichten für die Röntgenlithographie“
Technische Fachhochschule (TFH) Berlin, November 2003

Beisser, Nicolas
„Entwicklung, Konstruktion und Realisierung einer Justiervorrichtung für eine Gradientenlinse in der Mikrotechnik“
Technische Fachhochschule (TFH) Berlin, September 2003

Barth, Alexander
„Entwicklung, Konstruktion und Realisierung eines Messsystems zur Ermittlung der Intensität des Synchrotronstrahls“
Technische Fachhochschule (TFH) Berlin, Mai 2003

Wegwerth, Tillmann
„Kohlenstoffelektroden für die Bioanalytik“
Fachhochschule für Technik und Wirtschaft (FHTW) Berlin, 2002