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Dr. Klaus Ellmer

Institute Solar Fuels

(030) 8062 - 42770, (030) 8062 - 42226, (030) 8062 - 42088 (030) 8062 - 42434 ellmer@helmholtz-berlin.de

Ph.D. thesis

Ion Energy Distributions of Low-Energetic Ions after Passage through Thin Films

Research Fields
Deposition of layers for thin film solar cells, especially of wide bandgap semiconductors (ZnO, SnO₂, ITO, TiO₂) and sulfidic compound semiconductors (FeS₂, WS₂, MoS₂, RuS₂, CdS, CuInS₂) by magnetron sputtering.
In situ characterization of magnetron plasmas and of thin films by energy-dispersive mass spectrometry, plasma-emission  spectroscopy and energy-dispersive, time-resolved X-ray diffraction (EDXRD) at synchrotron radiation sources.