Dr. Klaus Ellmer
Ph.D. thesis1980 Humboldt-Universität Berlin
Ion Energy Distributions of Low-Energetic Ions after Passage through Thin Films
Deposition of layers for thin film solar cells, especially of wide bandgap semiconductors (ZnO, SnO2, ITO, TiO2) and sulfidic compound semiconductors (FeS2, WS2, MoS2, RuS2, CdS, CuInS2) by magnetron sputtering.
In situ characterization of magnetron plasmas and of thin films by energy-dispersive mass spectrometry, plasma-emission spectroscopy and energy-dispersive, time-resolved X-ray diffraction (EDXRD) at synchrotron radiation sources.