Electron Beam-Induced Current (EBIC)

• identify defects in semiconductors
• the electron beam induce a current in the sample
• this current is amplified and is used for imaging
• defects cause charge carrier recombination – such areas are dark
• measurements with an upgrade that was supplied by the company “point electronic” possible
• electric contacts to the samples have to be established

EBIC image of a recrystallized silicon surface (magnification 5000x)