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Electron Beam-Induced Current (EBIC)
- identify defects in semiconductors
- the electron beam induce a current in the sample
- this current is amplified and is used for imaging
- defects cause charge carrier recombination – such areas are dark
- measurements with an upgrade that was supplied by the company “point electronic” possible
- electric contacts to the samples have to be established
EBIC image of a recrystallized silicon surface (magnification 5000x)