Electron Beam-Induced Current (EBIC)

  • identify defects in semiconductors
  • the electron beam induce a current in the sample
  • this current is amplified and is used for imaging
  • defects cause charge carrier recombination – such areas are dark
  • measurements with an upgrade that was supplied by the company “point electronic” possible
  • electric contacts to the samples have to be established

EBIC image of a recrystallized silicon surface (magnification 5000x)