Cleanroom @EE-IS - EMIL
This clean room belongs to class 5 and is exclusively for silicon technology. Substrates of edge lengths between 10 by 10 mm and 150 by 150 mm or from 2 inch to 150 mm diameter can be processed here.
In the EMIL clean room, it is possible to treat silicon samples with wet chemical methods immediately prior to their coating in the SISSY laboratory. The samples can be transferred directly from the clean room through a material lock into the coating laboratory so that, for example, there are only extremely short times between final HF dip and the layer deposition.