Cleanroom @EE-IS 12.8
The Institute Silicon Photovoltaics operates two clean rooms for processes of semiconductor technology based on silicon material. One of them is located in the EMIL building, the second one is situated in the EE-IS building 12.8.
This is an ISO 7 clean room where the processes mentioned below were carried out on silicon wafers and silicon layers on glass substrates, and which are mainly used for the processing of solar cells. The processible substrate sizes are between edge lenghts of 10 mm × 10 mm and 100 mm × 100 mm or diameters between 2 inch and 100 mm.