The preparation of thin-film and heterostructure solar cells requires deposition techniques for absorber-, emitter-, and contact layers as well as surface structuring techniques. For the preparation of crystalline silicon thin-films on glass, crystallization techniques for amorphous silicon on glass are investigated.
- ECR-CVD (electron cyclotron resonance chemical vapor deposition)
- PE-CVD (plasma enhanced chemical vapor deposition)
- thermal evaporation / electron beam evaporation
- magnetron sputter technique