Reflection zone plates
At the FG-ANT wide variety of reflection zone plates are made. Since these zone plates are used as the dispersing optical element, only a part of the zone plate is used (off-axis).
Typical RZP geometry as the dispersing element
To get an impression of how the zone plates are prepared, here the typical manufacturing steps are shown:
- Applying a positive e-beam resist
- Exposure to a electron beam writer
- Development of the resist
- Reactive ion etching in the silicon substrate
- Detachment of the resist
- Coating with (typically) gold