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Reflection zone plates

At the FG-ANT wide variety of reflection zone plates are made. Since these zone plates are used as the dispersing optical element, only a part of the zone plate is used (off-axis).

enlarged view

Typical RZP geometry as the dispersing element

To get an impression of how the zone plates are prepared, here the typical manufacturing steps are shown:

  1. Applying a positive e-beam resist
  2. Exposure to a electron beam writer
  3. Development of the resist
  4. Reactive ion etching in the silicon substrate
  5. Detachment of the resist
  6. Coating with (typically) gold