Ruling machine - Design, configuration und construction

Housing of ruling machine

Owing to the extremely stringent requirement for accuracy, we will set a new benchmark with regard to the construction, configuration and design of the necessary special machines. Since no suppliers of suitable machines exist on the market, we have to design and construct them completely new. The greatest challenge about this is to design a new ruling.

Only few successful attempts to design and construct a fully operational ruling machine are known so far. Since there are only very few specialists worldwide capable of designing and constructing such a machine, the redevelopment requires intensive collaboration of HZB specialists as well as intensive participation of our institute. In addition, we try to involve external specialists/ special machine design companies known to us for their expertise and successful problem solutions in this area as well as at least three years verifiable experience with similar projects. We are dependant on their special knowledge, particularly regarding the basic conditions that must be met and the great demands on the machine components, the integrated metrology as well as the electrical engineering and control system.

Joint development efforts:

  • creation of a machine design for prototype
  • realisation of prototype
  • construction of machine for grating fabrication

Determination of suitable location for ruling machine

A typically manufactured grating consits of approximately 100.000 grooves ruled into the gold coated grating substrate. Since it takes about 10 seconds to rule one groove, the whole manufacturing process will last several days, if not weeks. The required positional accuracy of the grooves of +/- nanometers during this time implies extremly high demands on the location of the ruling machine, in particular with regard to temperature stability as well as dust, dirt and floor vibrations. Vibration measurements have been carried out at possible locations over a longer period of time. Furthermore, the floor load capacity had to be checked due to the heavy weight of the machine. Finally, two suitable locations could be determined, where additonal measures must be taken to protect the machine from vibrations. The ruling machine will be installed in a temperature-stablized (+/- 0,025°C) housing which is practically free of any heat source.