Nanometer Optical Component Measuring Machine

The NOM is a 2nd generation slope measuring instrument. It is a hybrid of an LTP-III head (designed by Peter Takacs (BNL)) and a modified autocollimator by Möller Wedel Optical GmbH.

The NOM enables the inspection of any kind of freeform shaped reflective optical components with an accuracy in the range of 0.05μrad rms for plane surfaces and 0.25 μrad rms for curved surfaces. The maximum scan length is 1.25 m. Surfaces can be characterized by line scan and or surface mapping measurements.

Nanometer Optical Component Measuring Machine – NOM at Metrology and Optics Testing Laboratory in HZB Adlershof