Institute Silicon Photovoltaics
Energy Dispersive X-ray analysis (EDX)
- information about the chemical composition of the sample
- atoms are excited by electron beam, characteristic X-rays are produced
- analysis of these X-rays is performed by an EDAX Silicon Drift Detector (SDD)
- element identifications and quantifications beyond boron with a resolution MnKa = 125eV and very high count rates are possible
- Line scans and mappings can be used to measure element distributions in a short time
- the samples have to be homogeneous
- the information depth can be several µm
Cu distribution in a CuInS2 layer, the bright areas show fields with high Cu-concentration
