PTB-EUV
PTB-EUV
Beamline data | |
---|---|
Segment | H07 |
Location (Pillar) | 9.1 |
Source | D72 (Dipole) |
Monochromator | PGM |
Energy range | 30 - 1800 eV |
Energy resolution | |
Flux | |
Polarisation | horizontal |
Divergence horizontal | mrad |
Divergence vertical | mrad |
Focus size (hor. x vert.) | |
User endstation | |
Distance Focus/last valve | mm |
Height Focus/floor level | mm |
Beam availability | |
Phone |
for more information please contact frank.scholze@ptb.de