PTB-EUV
PTB-EUV
| Beamline data | |
|---|---|
| Segment | H07 |
| Location (Pillar) | 9.1 |
| Source | D72 (Dipole) |
| Monochromator | PGM |
| Energy range | 30 - 1800 eV |
| Energy resolution | |
| Flux | |
| Polarisation | horizontal |
| Divergence horizontal | mrad |
| Divergence vertical | mrad |
| Focus size (hor. x vert.) | |
| User endstation | |
| Distance Focus/last valve | mm |
| Height Focus/floor level | mm |
| Beam availability | |
| Phone | |
for more information please contact frank.scholze@ptb.de