Small Reflectometer@KMC-1
Reflectometry - at-wavelength metrology /KMC-1
The Small Reflectometer is a multipurpose instrument to determine the optical properties of samples in transmission or reflection. Mounted at the double crystal monochromator beamline KMC-1 the energy range between 2 and 12 keV is accessible.
The Small Reflectometer is equipped with 3 UHV-compatible goniometers (Huber 408 and 410) and UHV stepper motors (Phytron) for varying the incidence angle at the sample and for positioning the detector in plane or out of plane. The reflection plane is vertical (i.e. in general s-polarisation geometry).
Reflectivity can be determined at a fixed photon energy as function of the incidence angle or vice versa as function of the energy for a certain incidence angle. The samples can have a size from a few square millimeters to macroscopic optical elements, thus performance measurements on realistic beamline optical components like mirrors, gratings or crystals are possible as well as the investigation of e.g. multilayer samples on Si-wafer substrates.
Selected Applications:- at-wavelength metrology on EUV/XUV/tender-X-ray optics (diffraction gratings, ML or single coated mirrors, filters and etc.)
- Extreme Ultraviolet/Soft X-ray/XUV/Tender-X-ray reflectometry (SXR, XRR)
Methods
Reflectivity, NEXAFS, Reflectometry
Remote access
depends on experiment - please discuss with Instrument Scientist
| Instrument data | |
|---|---|
| Phone (~49 30 8062-) | 14838 |
| Beam availability | 24h/d |
| Source | D11 (Dipole) |
| Monochromator | KMC-1; Crystal pairs available: Si(111), Si(311), Si(422). |
| Energy range (at experiment) | tbd |
| Energy resolution | 1000 at 4 keV |
| Flux | 1e11 at 4 keV |
| Polarisation | horizontal |
| Focus size (hor. x vert.) | 0.4 x 0.6 mm |
| Temperature range | room temperature |
| Pressure range | For details contact the instrument scientist. |
| Detector | GaAs-photodiodes, Channeltron |
| Manipulators | 3 independent goniometers for sample (incidence angle theta), detector in-plane (twotheta) and off-plane (detector) scans, off-plane linear sample translation for sample positioning (sample_x) |
| Sample holder compatibility | For details contact the instrument scientist. |
| Additional equipment | |
| Additional information | Further details: beamline KMC-1 |
| Max. sample size | 150 x 40 x 35 (L x W x H) mm |
| Min. sample size | 5 x 5 x 0.5 (L x W x H) mm |
| Sample scan range | 90 to +90 degree |
| Min. angle to normal | 2.0 degree |
For more details please contact the Instrument Scientist(s).