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  Myasoedova, T. N.; Yalovega, G. E.; Plugotarenko, N. K.; Brzhezinskaya, M.; Petrov, V. V.; Moiseeva, T. A.; Shmatko, V. A.: CuO_x Films for NO₂ Detection: Microstructurel Characterization. Applied Mechanics and Materials 481 (2014), p. 133-136

10.4028/www.scientific.net/AMM.481.133

Abstract:
Copper oxides films as promising materials for gas sensors applications were studied. Copper oxide films were deposited onto Si/SiO2 substrates using a citrate sol-gel method with the subsequent temperature treatment at 150-500⁰C. These films were characterized by means of secondary electron microscopy (SEM) and X-ray-absorption near-edge structure (XANES) spectroscopy. The prepared films were utilized in NO2 sensors. The dependences of the NO2 response on the operating temperature and NO2 concentration (10-200 ppm) were investigated. The maximum NO2 response was achieved for the film annealed at 250⁰C.