Klein, D.; Ohm, W.; Fengler, S.; Kunst, M.: Comparison between transient and frequency modulated excitation: Application to silicon nitride and aluminum oxide coatings of silicon. Review of Scientific Instruments 85 (2014), p. 065105/1-9
Contactless measurements of the lifetime of charge carriers are presented with varying ways of photoexcitation: with and without bias light and pulsed and frequency modulated. These methods are applied to the study of the surface passivation of single crystalline silicon by a-SiNx:H and Al2O3 coatings. The properties of these coatings are investigated under consideration of the merits of the different methods.