Hafner, A.; Anklamm, L.; Firsov, A.; Firsov, A.; Löchel, H.; Sokolov, A.; Gubzokov, R.; Erko, A.: Reflection zone plate wavelength-dispersive spectrometer for ultra-light elements measurements. Optics Express 23 (2015), p. 29476-29483
10.1364/OE.23.029476
Open Access Version
Abstract:
We have developed an electron beam excitation ultra-soft X-ray add-on device for a scanning electron microscope with a reflective zone plate mulichannel spectrometer in order to analyse ultra-light elements such as Li and B. This spectrometer has high (~100) resolving power in the energy range of 45 eV – 1120 eV. Metallic Li samples were examined and fluorescence spectra successfully measured. Energy resolution of 0.49 eV was measured in the ultra-low energy range using the Al L2,3 line at 71 eV. High sensitivity of Boron detection was demonstrated on a B4C sample with layer thicknesses of 1-50 nm, detecting an amount of metallic Boron as small as ~ 0.57 fg.