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20th Workshop on Dielectrics in Microelectronics (WODIM 2018)

JVST Information for Authors



Papers presented at the WODIM 2018 shall be submitted for publication in the Journal of Vacuum Science and Technology B (JVST B) for the Conference Collection: WODIM 2018.       The papers will be peer reviewed. Accepted papers will appear online immediately after proof processing and published in the next open issue of JVST B and placed in the Conference Collection: WODIM 2018.

Papers will be reviewed according to criteria set by the JVST and must meet JVST standards for both technical content and written English. All manuscripts are reviewed to the same standards as regular JVST submissions.

Submit your manuscripts to the JVST journal, chosen for your specific conference, using the journals’ online manuscript submission system, the JVST Peer X-Press site:


In preparing your article, you should follow the instructions for contributors, which may be found on the Information for Contributors link at

Information for Contributors.

Authors are encouraged to use the JVST templates. Please use the JVST Article Template for Word found on the above author information link. The easiest way to prepare your manuscript is to use the available JVST Article Template to delete and replace text as necessary.  

Note that acceptance to present at the conference does not guarantee the acceptance of the manuscript. To be published in JVST, the manuscript must:

(1) present original findings, conclusions or analysis that have not been published previously by the authors or others,

(2) be free of errors and ambiguities,

(3) support conclusions with data and analysis,

(4) be written clearly, and

(5) have high impact in its field, which must be within the scope of topics covered by the journal.

It is IMPORTANT that authors indicate to which conference the paper is submitted. Online, please do select this is for the Conference Collection: WODIM 2018.


Acceptable manuscript file types are MSWord, LaTeX, and PDF. For the initial submission and review process, a single PDF or MSWord file including the figures is sufficient. However, once a paper is accepted, MSWord or TeX file of the text, any tables and the list of figure captions along with the separate figure files will be required for final production. Use of color in Figures is encouraged. For any other details about manuscript preparation, please refer to the JVST B Information for Contributors.


SUBMIT MANUSCRIPT to: http://jvstb.peerx-press.org by October 12, 2018