EMIL

Deposition Infrastructures

A major feature of the SISSY-Lab is the direct connection of a large variety of deposition instruments to the analysis stations SISSY-1 and SISSY-nonSR via a fully automatized UHV-transfer backbone. By this arrangement, deposition sequences can be analyzed step by step in-system. With special precautions regarding cross-contamination, even combinations of different material classes can be produced and analyzed.

The deposition instruments installed and planned are

• Thin film Silicon Cluster
• Thermoelectric Sputtertool
• UHV- organic and inorganic preparation chambers
• Glovebox preparation
  
  Kobius Silicon deposition  cluster official webpage