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PVcomB

Key Equipment

Our group operates a variety of state-of-the-art deposition, structuring and characterisation instruments that are used for research and development of catalyst materials, microsystems and reactors. 

A unique feature of the deposition tool is that they offer a sample transfer to the synchrotron and lab based analytics infrastructure availabe at the EMIL corelab of HZB. Access to our facilites can be arranged based on research collaborations or on cost basis. 

Deposition / Sample Preparation

Von Ardenne CS400 (PVD, PECVD)

Mid-temperature PECVD/PVD cluster system

  • PECVD a-Si(i/n/p):H, SiOx,
  • high rate electron beam evaporator (up to 1000nm/min)
  • plasma RTP annealing chamber

Analytics (finalised Q3/2025)