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Silicon Heterojunction Solar Cells

Silicon heterojunction (SHJ) solar cells are made of silicon wafers using passivated contacts for both polarities based on i/n and i/p stacks of thin-film silicon alloys, such as amorphous silicon (a-Si:H), nanocrystalline silicon (nc-Si:H) or silicon oxide (nc-SiOx:H). Due to a high silicon wafer quality and the excellent surface passivation SHJ solar cells reach very high conversion efficiencies with highest open circuit voltages >740 mV and low temperature coefficient <0.3 %/K. The lean cell process sequence of only four major process steps, all below <200°C processing temperature facilitate cost-effective production.

At PVcomB we operate a baseline for SHJ solar cells (Figure 1) currently reaching a certified efficiency of 24.6% (Figure 2). Processes and materials are developed up to a size of 166 x 166 mm² (M6), partially in cooperation with industry partners for:

  • High-efficiency PV cells and modules
  • Silicon heterojunction solar cells for application as bottom cell in high-efficiency multi-junctions, e.g. with perovskite top cells.
  • Advanced silicon-based passivating contact layers for novel types of silicon-based solar cells, such as liquid-phase crystallized silicon (LPC-Si) solar cells on glass.
  • Silicon heterojunction and thin-film silicon solar cells for hydrogen generation.
  • All-rear-contacted (IBC) silicon heterojunction solar cells.

HIT process - enlarged view

Fig. 1: Baseline process sequence and device structure for Silicon Heterojunction solar cells at PVcomB.