Alktash, N.; Muydinov, R.; Erfurt, D.; Hartig, M.; Gajewski, W.; Szyszka, B.: Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films. Review of Scientific Instruments 94 (2023), p. 075104/1-15
10.1063/5.0148807
Open Access Version
