Baumann, J.; Grötzsch, D.; Scharf, O.; Kodalle, T.; Bergmann, R.; Bilchenko, F.; Mantouvalou, I.; Kanngießer, B.: A compact and efficient angle-resolved X-ray fluorescence spectrometer for elemental depth profiling. Spectrochimica Acta A 181 (2021), p. 106216/1-10
10.1016/j.sab.2021.106216
Abstract:
An angle resolved X-ray fluorescence spectrometer based on the concept of scanning-free shallow detection with energy-dispersive area detectors is presented. The instrument is characterized with respect to energy resolution, linearity, angular discrimination and repeatability and the necessary data evaluation strategies are presented in detail. As demonstration of its capabilities and showcase for potential applications, two different copper indium gallium (di)selenide (CIGS) absorber layers, typically applied in thin film solar cells, are analyzed. In combination with quantitative (but integral) results for layer composition and layer thickness from a commercial XRF spectrometer, depth profiles of the Ga concentration of both ≈ 2 μm thin samples are obtained. The results of the novel spectrometer compare well with quantitative depth-profiles obtained from glow-discharge optical emission spectrometry. The combination of simplicity, stability and efficiency of the spectrometer concept makes it a potential candidate for industrial applications. Description of compact angle-resolved X-ray fluorescence spectrometer. Exploiting scanning-free grazing emission X-ray fluorescence approach. Energy dispersive charge-coupled device with single-photon detection. Enabling non-destructive, quantitative elemental depth profiling. Depth profiling of nano-structured stratified specimen, here CIGS solar cells.