Method: Making thin films

Making thin films

Instrument Sample types Laboratory assignment Contact
Spin-Coater @Röntgenoptiken Multilayer/Film, Liquid Röntgenoptiken Gerd Schneider
Stephan Werner
Stefan Rehbein
RIE-Anlage @ Röntgenoptiken Multilayer/Film Röntgenoptiken Gerd Schneider
Stephan Werner
Stefan Rehbein
ESL System @E-Beam Hololab Multilayer/Film E-Beam Hololab Gerd Schneider
Stephan Werner
Stefan Rehbein
Co-Sputteranlage für Metalle & Metalloxide @ SISSY Multilayer/Film SISSY Daniel Amkreutz
Thermischer Verdampfer @ SISSY Multilayer/Film SISSY Daniel Amkreutz
Co-Sputteranlage @ SISSY Multilayer/Film SISSY Daniel Amkreutz
PECVD @ SISSY Multilayer/Film, Gas SISSY Daniel Amkreutz
RIE @ SISSY Multilayer/Film SISSY Daniel Amkreutz
DRIE @ SISSY Multilayer/Film SISSY Daniel Amkreutz
ALD @ SISSY Multilayer/Film SISSY Daniel Amkreutz
Spincoater Chemat Technology KW4A @Chem. Lab EMIL Multilayer/Film Chemistry Lab EMIL Alejandra Ramírez Caro
Sputter Coater Cressington 208 HR @CAT Multilayer/Film CAT Michael Hävecker
Spin coater Spin150 @Inorganic Synthesis lab. Multilayer/Film, Liquid Inorganic Synthesis lab. Merve Aktürk
Dip Coater Ossila @Inorganic Synthesis lab. Multilayer/Film, Liquid Inorganic Synthesis lab. Merve Aktürk