Polkovnikov, V.N.; Shaposhnikov, R.A.; Zuev, S.Y.; Svechnikov, M.V.; Sertsu, M.G.; Sokolov, A.; Schäfers, F.; Chkhalo, N.I.: Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm. Optics Express 30 (2022), p. 19332-19342
10.1364/oe.448069
Open Access Version
Abstract:
The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that the deposition of B4C barrier layers onto Y layers makes it possible to significantly increase the reflection coefficient compared to structures without barrier layers. A reflectance of 54% was obtained for mirrors optimized for 11.4 nm, which is close to the theoretical limit for these materials.