Ohdaira, K.; Trinh, C.T.; Matsumura, H.: Passivation of textured crystalline silicon surfaces by catalytic CVD silicon nitride films and catalytic phosphorus doping. Japanese Journal of Applied Physics 56 (2017), p. 102301/1-4
10.7567/JJAP.56.102301
Open Access Version (externer Anbieter)