Microscope Nikon @Cleanroom EMIL

Microscope

The Nikon LV150N optical microscope is a versatile system for high-resolution material and surface analysis. It enables investigations at magnifications of up to 150× and provides various contrast techniques such as bright-field, dark-field, and DIC microscopy (Differential Interference Contrast). This allows precise visualization and evaluation of surface structures as well as fine topographical differences.

Selected Applications:
  • Analysis of silicon samples after wet-chemical etching
  • Investigation of etched surface structures
  • Detection and evaluation of surface defects and imperfections
  • Characterization of etching patterns and crystal structures
  • Microscopic examination of material homogeneity and surface morphology

Methods

Lichtmikroskopie

The instrument can be used

Laboratories

Cleanroom EMIL

Sample types

Amorphous, Crystal, Multilayer/Film

Short description Optical microscope
Usage internal usage
Building/room 14.54 (EMIL) /0013
Location Adlershof
Additional information In radiation protection area. Operation permitted only after completed laboratory training/instruction.
Instrument parameter
Microscope Type Upright reflected-light microscope
Observation Methods Brightfield, Darkfield, DIC, Polarization
Maximum Magnification 5x, 50x, 100x, 150x
Focusing System Coarse and fine focus adjustment
Fine Focus Resolution 1 µm graduation
Sample Applications Silicon wafer and material surface inspection

For more details and current status of the Instrument please contact the Instrument Scientist.