Profilometer Bruker Dektak XT @SCALA

Profilometer

The Dektak XT is a 2D contact profilometer designed for measuring step height, pitch, and surface roughness. System data collection and analysis are managed using the Vision 64 application software.

Selected Applications:
  • Ideal for flat surfaces
Dektak XT Profilometer

  • Stylus Contact Profilometry
  • Two-dimensional surface profile measurements
  • Stylus Force 1 to 15 mg
  • 12.5 um diameter tip
  • Sample X/Y Stage Manual 100mm (4 in.) X/Y, manual leveling
  • Software Vision 64 Operation and Analysis Software
  • Scan Length Range 55 mm (2in.)
  • Data Points Per Scan 120,000 maximum
  • Max. Sample Thickness 50 mm (1.95 in.)
  • Max. Wafer Size 200 mm (8in.)
  • Step Height Repeatability <5 Å, 1sigma on 0.1 μm step
  • Vertical Range 1 mm (0.039 in.)
  • Vertical Resolution 1 Å max. (@ 6.55_m range)

Methods

Profilometer

The instrument can be used

by external users

Laboratories

SCALA

Sample types

Amorphous, Crystal, Multilayer/Film

Short description
Usage
Building/room 14.54 (EMIL)/ 0009
Location Adlershof
Additional information
Instrument parameter

For more details and current status of the Instrument please contact the Instrument Scientist.