RIE-Anlage @ Röntgenoptiken
dry etching system
Methods
IR Spectroscopy, Making thin films
The instrument can be used
by no other users than the organisational unit
Laboratories
Sample types
| Short description | |
| Usage | |
| Building/room | 14.51 / 3128 |
| Location | Adlershof |
| Additional information | |
| Instrument parameter | |
For more details and current status of the Instrument please contact the Instrument Scientist.