ESL System @E-Beam Hololab
Electron beam lithography system
Methods
The instrument can be used
by internal users
Laboratories
Sample types
| Short description | |
| Usage | |
| Building/room | 14.51 / 6110 |
| Location | Adlershof |
| Additional information | |
| Instrument parameter | |
For more details and current status of the Instrument please contact the Instrument Scientist.