3 PANalytical MRD for epitaxy analysis (LMC)

PANalytical MRD for HR-XRD (epitaxy)

PANalytical MRD for µXRD and epitaxy analysis

PANalytical MRD for µXRD and epitaxy analysis

Left: Extended setup with X-ray mirror, Bartels (4-fold) monochromator, analyzer and triple axis for high-resolution XRD/XRR. Right: Reciprocal space map of GaPN on Si substrate (image courtesy of H.

Left: Extended setup with X-ray mirror, Bartels (4-fold) monochromator, analyzer and triple axis for high-resolution XRD/XRR. Right: Reciprocal space map of GaPN on Si substrate (image courtesy of H.

Methods

Micro-diffraction, Epitaxy

The instrument can be used

by external users, by internal users, in cooperation with the organisational unit

Laboratories

X-Ray CoreLab

Sample types

Short description
Usage
Building/room LMC / PT005
Location
Additional information
Instrument parameter