Lacey, I.; Anderson, K.; Dickert, J.; Geckeler, R.; Just, A.; Siewert, F.; Smith, B.; Yashchuk, V.: Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors. In: Lahsen Assoufid, Haruhiko Ohashi, Anand Asundi [Ed.] : Advances in Metrology for X-Ray and EUV Optics VIII : 11-12 August 2019, San Diego, California, United States. Bellingham, Wash.: SPIE, 2019 (Proceedings of SPIE ; 11109). - ISBN 978-1-5106-2912-7, p. 1110905/1-16
10.1117/12.2529519
Open Accesn Version

Abstract:
X-ray optics, desired for beamlines at free-electron-laser and diffraction-limited-storage-ring x-ray light sources, must have almost perfect surfaces, capable of delivering light to experiments without significant degradation of brightness and coherence. To accurately characterize such optics at an optical metrology lab, two basic types of surface slope profilometers are used: the long trace profilers (LTPs) and nanometer optical measuring (NOM) like angular deflectometers, based on electronic autocollimator (AC) ELCOMAT-3000. The inherent systematic errors of the instrument’s optical sensors set the principle limit to their measuring performance. Where autocollimator of a NOM-like profiler may be calibrated at a unique dedicated facility, this is for a particular configuration of distance, aperture size, and angular range that does not always match the exact use in a scanning measurement with the profiler. Here we discuss the developed methodology, experimental set-up, and numerical methods of transferring the calibration of one reference AC to the scanning AC of the Optical Surface Measuring System (OSMS), recently brought to operation at the ALS Xray Optics Laboratory. We show that precision calibration of the OSMS performed in three steps, allows us to provide high confidence and accuracy low-spatial-frequency metrology and not ‘print into’ measurements the inherent systematic error of tool in use. With the examples of the OSMS measurements with a state-of-the-art x-ray aspherical mirror, available from one of the most advanced vendors of X-ray optics, we demonstrate the high efficacy of the developed calibration procedure. The results of our work are important for obtaining high reliability data, needed for sophisticated numerical simulations of beamline performance and optimization of beamline usage of the optics. This work was supported by the U. S. Department of Energy under contract number DE-AC02-05CH11231.