Grubert, B.; Kreitschik, D.; Schnabel, O.; Siewert, F.; Geckeler, R.; Schumann, M.; Just, A.; Krause, M.; Yandayan, T.; Akgoz, S.A.: A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers. In: Lahsen Assoufid, Haruhiko Ohashi, Anand Asundi [Ed.] : Advances in Metrology for X-Ray and EUV Optics VIII : 11-12 August 2019, San Diego, California, United StatesBellingham, Wash.: SPIE , 2019 (Proceedings of SPIE ; 11109). - ISBN 978-1-5106-2912-7, p. 1110902/1-14
10.1117/12.2531613
Abstract:
A new Aperture Centring Device (ACenD) for precisely positioning small apertures with respect to the autocollimator’s optics has been developed. With the new device, differences in the angle response of autocollimators between the calibration at a laboratory and their subsequent application in the slope measuring profilers are significantly minimized. Evaluation of the device with a circular aperture size of d=2.5 mm was carried out in different laboratories. It was verified that the ACenD is capable of achieving a reproducible aperture alignment < 0.1 mm. The device is a substantial aid for the operation of slope measuring profilometers and enables the measurable, documentable, and transferable positioning of apertures that did not exist before.