Huang, Q.; Feng, J.; Li, T.; Wang, X.; Kozhenikov, I.V.; Yang, Y.; Qui, R.; Sokolov, A.; Giday Sertsu, M.; Schäfers, F.; Li, W.; Xie, C.; Zhang, Z.; Wang, Z.: Narrowband lamellar multilayer grating with low contrast MoSi2/Si materials for soft X-ray region. Journal of Physics D: Applied Physics 52 (2019), p. 195303/1-6
10.1088/1361-6463/ab0873
Open Accesn Version