1 PANalytical MPD for thin film analysis (LMC)
PANalytical MPD for thin film analysis
PANalytical X'Pert Pro MPD (multi-purpose diffractometer) primarily for thin film analysis using grazing incidence geometry (e.g. phase analysis, microstructure). Set-up changeable to Bragg-Brentano geometry and sample spinner for powder diffraction.
» GIXRD with parallel beam
- (depth-resolved) thin film analysis
» Bragg-Brentano geometry (BB, Theta-2Theta) with parafocusing beam
- qualitative stress analysis of thin films
- powder X-ray diffraction
» X-ray reflectometry (XRR)
- determination of layer thickness, surface roughness and density
» Equipment
- X-ray mirror for parallel beam and suppression both of Cu K-beta and continuous radiation
- fixed divergence slit for focusing beam
- (IR) sample stage for large sample dimensions and additional build-ups
- rotatable sample stage for powder specimens
- programmable XYZ sample stage utilizable for lateral scans and as automatic sample changer
- PIXcel 0D/1D semi-conductor detetctor
- Xe 0D proportional detector with parallel plate collimator
Methods
Microstructure, Phase analysis, Thin film profiling, Powder Diffraction, Thin film analysis
The instrument can be used
by external users, by internal users, in cooperation with the organisational unit
Laboratories
Sample types
| Short description | |
| Usage | |
| Building/room | LMC / PT005 |
| Location | |
| Additional information | |
| Instrument parameter | |