Reflectometry - At-wavelength metrology
- Quality control of optical elements
- In-house R&D
- User operation
- Short-term access
The versatile 10 axes UHV-reflectometer is a permanent end station of the Optics Beamline delivering UV and XUV radiation. It is located in a clean-room hutch at DIP 1.1.
The samples are adjustable within six degrees of freedom, and the reflectivity can be measured at all incidence angles for both s- and p-polarisation geometry.
The reflectometer is primarily dedicated to the in-house R&D in optics development and at-wavelength metrology of our in-house produced diffraction gratings and (multilayer) optical elements.
Beamtime at this station is available by user-proposals or, at short-term request, by cooperation with our Institute for Nanometre Optics and Technology (FG-INT).
|Temperature range||room temperature|
|Detector||GaAs-photodiodes (4 mm x 4 mm) w/o pinholes and slits|
|Manipulators||3 goniometers (Huber model 430, 411) for sample (azimuth and incidence angle theta) and detector (twotheta) scan, 6-axes sample positioning, 2 motors for detector off-plane scan|
|Sample holder compatibility|
|Max. sample size||360 x 60 x 60 (L x W x H) mm|
|Min. sample size||5 x 5 x 0.5 (L x W x H) mm|
|Azimuthal angle scan range||0 - 360 degree|
|Incidence angle scan range||-90 - 90 degree|
|Minimum angle to normal||2 degree|