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Liquid Phase Crystallization of Silicon on Insulators (en)

The liquid phase crystallization technology (LPC) of silicon on insulators (SOI) was developed in a joint research of the Technical University Hamburg-Harburg and the Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (HZB) in 2011. As an advanced zone melting process, the technology utilizes state of the art laser systems to fabricate high quality multi crystalline silicon layers directly on glass substrates. Prior to laser crystallization pre-cursor stacks consisting of a plasma enhanced chemical vapor deposited intermediate layer stack (PECVD) and a final electron beam evaporated silicon layer (PVD) are prepared.

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