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  Zhang, W.; Bunte, E.; Ruske, F.; Köhl, D.; Besmehn, A.; Worbs, J.; Siekmann, H.; Kirchhoff, J.; Gordijn, A.; Hüpkes, J.: As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering. Thin Solid Films 520 (2012), p. 4208-4213

10.1016/j.tsf.2011.04.098

Abstract:
This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 × 10−4 Ω · cm and the transparency in the near-infrared spectral range is high (> 80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm².