Weidemann, S.; Kockert, M.; Wallacher, D.; Ramsteiner, M.; Mogilatenko, A.; Rademann, K.; Fischer, S.F.: Controlled Pore Formation on Mesoporous Single Crystalline Silicon Nanowires: Threshold and Mechanisms. Journal of Nanomaterials 2015 (2015), p. 672305/1-11
10.1155/2015/672305
Open Accesn Version
Abstract:
Silicon nanowires are prepared by the method of the two-step metal-assisted wet chemical etching. We analyzed the structure of solid, rough, and porous nanowire surfaces of boron-doped silicon substrates with resistivities of rho > 1000 Ohm cm, rho = 14–23 Ohm cm, and rho < 0.01 Ohm cm by scanning electron microscopy and nitrogen gas adsorption. Silicon nanowires prepared fromhighly doped silicon reveal mesopores on their surface.However, we found a limit for pore formation. Pores were only formed by etching below a critical H2O2 concentration (c[H2O2] < 0.3 M). Furthermore, we determined the pore size distribution dependent on the etching parameters and characterized the morphology of the pores on the nanowire surface. The pores are in the regime of small mesopores with a mean diameter of 9–13 nm. Crystal and surface structure of individual mesoporous nanowires were investigated by transmission electron microscopy. The vibrational properties of nanowire ensembles were investigated by Raman spectroscopy. Heavily borondoped silicon nanowires are highly porous and the remaining single crystalline silicon nanoscale mesh leads to a redshift and a strong asymmetric line broadening for Raman scattering by optical phonons at 520 cm^-1. This redshift, lambda[Si bulk] = 520 cm^-1 -> lambda[Si nanowire] = 512 cm^-1, hints to a phonon confinement in mesoporous single crystalline silicon nanowires.