VUV Ellipsometer
VUV/XUV ellipsometry station
Methods
Remote access
not possible
| Station data | |
|---|---|
| Temperature range | |
| Pressure range | |
| Detector | |
| Manipulators | |
| Sample holder compatibility | |
| Additional equipment | |
VUV/XUV ellipsometry station
not possible
| Station data | |
|---|---|
| Temperature range | |
| Pressure range | |
| Detector | |
| Manipulators | |
| Sample holder compatibility | |
| Additional equipment | |
VUV/XUV ellipsometry station