Optics Beamline

Optics Beamline

This soft x-ray bending magnet beamline is equipped with a Plane Grating Monochromator operated in collimated light (collimated PGM). It uses the SX700-1 monochromator equipped with two diffraction gratings 150l/mm for low and 1200 l/mm for high energy ranges. The beamline is optimised for operation with moderate energy resolution but at very high specular purity and efficient stray light reduction provided by a 4-mirror High order suppressor (HIOS), a Filter and Slit Unit (FSU) and additional system of adjustable apertures over the beamline.

  • at-wavelength metrology on XUV optics (diffraction gratings, ML or single coated mirrors, filters and etc.)
  • Soft X-ray/XUV reflectometry (SXR, XRR)

Station data
Temperature range room temperature
Pressure range For details contact the station manager.
Weitere Details Reflectometer
Beamline data
Segment H01
Location (Pillar) 3.1
Source D11 (Dipole)
Monochromator coll.-PGM (SX700-1)
Energy range 12.5 - 1850 eV
Energy resolution 7,000 at 400 eV
Flux 1e9 - 1e10 phot/s
Polarisation horizontal
Divergence horizontal 3.6 mrad
Divergence vertical 0.5 mrad
Focus size (hor. x vert.) 0.3 x 0.2 mm2 (h x v)
User endstation not possible
Distance Focus/last valve 1350 mm
Height Focus/floor level 1420 mm
Beam availability 24h/d
Phone +49 30 8062 14755

    The beamline is permanently coupled with versatile 11-axis UHV reflectometer. The reflectometer is optimized for operation with small test sampleas as well as for characterisation of real live-sized optical elements. The whole experiment is located in a clean-room hutch providing rather safe for tested contamination sensetive optics.

    The setup is primarily dedicated to the in-house R&D in XUV optics and at-wavelength metrology of in-house produced diffraction gratings. It is also available by user-proposals with possibilty of a short-term request is specific cases.