- Collimated PGM (SX700-1)
- 10 - 2000 eV
- Moderate resolution
- Polarisation linear
- Efficient higher order light suppression
- Low divergence, small spot size
Reflectometer Experimental Station
- At-wavelength metrology
- Quality control of large optical elements
- In-house R&D
- User operation
- Short-term access
This soft x-ray bending magnet beamline is equipped with a Plane Grating Monochromator operated in collimated light (collimated PGM). It uses the SX700-1 monochromator equipped with two blazed diffraction gratings produced in-house. The bending magnet beamline is optimised for moderate resolution at very high specular purity and efficient stray light reduction by a 4-mirror High order suppressor (HIOS) and a Filter and Slit Unit (FSU).
At this beamline a versatile reflectometer for at-wavelength metrology is coupled. This 10-axes instrument allows characterisation of real live-sized optical elements. This permanent endstation is located in a clean-room hutch.
The Optics Beamline with the reflectometer is primarily dedicated to the in-house R&D in optics development and at-wavelength metrology of our in-house produced diffraction gratings and (multilayer) optical elements.
Beamtime at this station is available by user-proposals or, at short-term request, by cooperation with our Institute for Nanometre Optics and Technology (FG-INT).
|Temperature range||Pressure Range|
|Reflectometer||room temperature||For details contact the station manager.|
|Energy range||10 - 2000 eV|
|Energy resolution||7,000 at 400 eV|
|Flux||1e9 - 1e10 phot/s|
|Divergence horizontal||2.33 mrad|
|Divergence vertical||1 mrad|
|Focus size (hor. x vert.)||0.16 x 0.2 mm2 (h x v)|
|User endstation||not possible|
|Distance Focus/last valve||1350 mm|
|Height Focus/floor level||1420 mm|
|Phone||+49 30 8062 14755|