Optics Beamline
Optics Beamline
This soft x-ray bending magnet beamline is equipped with a Plane Grating Monochromator operated in collimated light (collimated PGM). It uses the SX700-1 monochromator equipped with two diffraction gratings 150l/mm for low and 1200 l/mm for high energy ranges. The beamline is optimised for operation with moderate energy resolution but at very high specular purity and efficient stray light reduction provided by a 4-mirror High order suppressor (HIOS), a Filter and Slit Unit (FSU) and additional system of adjustable apertures over the beamline.
Selected Applications:- at-wavelength metrology on XUV optics (diffraction gratings, ML or single coated mirrors, filters and etc.)
- Soft X-ray/XUV reflectometry (SXR, XRR)
| Station data | |
|---|---|
| Temperature range | room temperature |
| Pressure range | For details contact the station manager. |
| More details | Reflectometer |
| Beamline data | |
| Segment | H01 |
| Location (Pillar) | 3.1 |
| Source | D11 (Dipole) |
| Monochromator | coll.-PGM (SX700-1) |
| Energy range | 12.5 - 1850 eV |
| Energy resolution | 7,000 at 400 eV |
| Flux | 1e9 - 1e10 phot/s |
| Polarisation | horizontal |
| Divergence horizontal | 3.6 mrad |
| Divergence vertical | 0.5 mrad |
| Focus size (hor. x vert.) | 0.3 x 0.2 mm2 (h x v) |
| User endstation | not possible |
| Distance Focus/last valve | 1350 mm |
| Height Focus/floor level | 1420 mm |
| Beam availability | 24h/d |
| Phone | +49 30 8062 14755 |
The beamline is permanently coupled with versatile 11-axis UHV reflectometer. The reflectometer is optimized for operation with small test sampleas as well as for characterisation of real live-sized optical elements. The whole experiment is located in a clean-room hutch providing rather safe for tested contamination sensetive optics.
The setup is primarily dedicated to the in-house R&D in XUV optics and at-wavelength metrology of in-house produced diffraction gratings. It is also available by user-proposals with possibilty of a short-term request is specific cases.