Vainer, Y.A.; Garakhin, S.A.; Zuev, S.Y.; Nechay, A.N.; Pleshkov, R.S.; Polkovnikov, V.N.; Salashchenko, N.N.; Svechnikov, M.V.; Sertsu, M.G.; Smertin, R.M.; Sokolov, A.; Chkhalo, N.I.; Schäfers, F.: Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges. Journal of Surface Investigation 14 (2020), p. 124-134
10.1134/s1027451020020160
Abstract:
The latest experimental results of studying beryllium-containing multilayer mirrors are reviewed. The mirrors are of interest for projection nanolithography, solar astronomy, X-ray microscopy, and other applications. It is shown that for a number of ranges beryllium-containing multilayer mirrors щгtperform the world analogues in their X-ray optical characteristics.