Dehlinger, M.; Dorczynski, C.; Fauquet, C.; Jandard, F.; Tonneau, D.; Bjeoumikhov, A.; Bjeoumikhova, S.; Gubzhokov, R.; Erko, A.; Zizak, I.; Pailharey, D.; Ferrero, S.; Dahmani, B.: Feasibility of simultaneous surface topography and XRF mapping using Shear Force Microscopy. International Journal of Nanotechnology 9 (2012), p. 460-470
10.1504/IJNT.2012.045348
Abstract:
Marketed sources equipped with polycapillary optics allow now laboratory X-Ray Fluorescence (XRF) analysis with 5-10 µm lateral resolution. To improve it, we had the idea to use a thin cylindrical X-ray capillary fitted to the XRF detector. The combination with near-field microscopy would then lead to a simultaneous record of both topography and XRF from a sample at µm lateral resolution. For this purpose, we have built a home-made Shear Force Microscope to carry out this experiment in the future.In a first step, we have validated the microscope, operating in SNOM configuration, using test sample consisting in ZnO clusters deposited on a Si3N4 grating. Second, the feasibility of XRF collection through a thin X-ray cylindrical capillary on Co/Ti sample is shown in this work. The results suggest that sub-1 µm in-lab XRF analysis is possible, replacing the optical fibre of our SNOM apparatus by an X-ray capillary. On the basis of modelling our results, we then further discuss the possibility to reach 100 nm XRF resolution, combined to surface topography, working in synchrotron environment.