• 
  Lemke, S.; Seliger, T.; Rudolph, I.; Kutz, O.; Goettert, Ph.; Nelles, B.; Senf, F.; Löchel, B.: Status of laminar grating manufacturing via lithography at HZB. Microsystem Technologies 4 (2014), p. 2061-2064

10.1007/s00542-013-2061-z